APPARATUS FOR GROWING SINGLE CRYSTAL USING MICRO-WAVE AND METHOD FOR GROWING THE SAME

摘要

PURPOSE: An apparatus and method for growing a single crystal using a micro wave are provided to minimize a temperature deviation in a crucible by raising and maintaining a temperature due to heat from ceramic single crystal materials and a heater. CONSTITUTION: A growing furnace(10) includes an insulation pelt inside. A crucible(20) is installed in the inside of the insulation pelt. A main heating unit(30) provides heat to the crucible. An auxiliary heating unit(60) heats the single crystal materials in the crucible. A cooling unit(80) supplies refrigerant to a cooling chamber.