LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD USING THE SAME

摘要

PURPOSE: A laser processing system and method are provided to minimize resolidification of melt on the inner wall of a fine hole by using a hollow laser beam to bore the fine hole. CONSTITUTION: A laser processing system comprises a laser generating unit, a hollow laser beam forming unit which changes the laser beam from the laser generating unit into a hollow laser beam(40), and a stage on which a work piece irradiated with the hollow laser beam is placed. In the hollow laser beam, 70-90% of energy density is concentrated on the edge.