| 摘要 |
PURPOSE: An integrated circuit including a place-efficient capacitor and a manufacturing method thereof are provided to increase the size of an integrated circuit by increasing an effective area between capacitor electrodes. CONSTITUTION: An integrated circuit is provided(20). A partial opening is formed on a conductive feature(25). An etch preventing particle is deposited on a dielectric layer in the partial opening(30). A dielectric layer is etched(40). A first conductive layer is formed(50). A capacitor insulation layer is formed on the first conductive layer(60). A second conductive layer is formed on the capacitor insulation layer(70). |
