RETICLE AND RETICLE CASSETTE STOCKER

摘要

PURPOSE: A reticle and reticle cassette storage device is provided to reduce the mobility load rate of an OHT(Overhead hoist transfer) to transfer a reticle. CONSTITUTION: A reticle cassette storage unit includes a first storage module(140) to store a reticle cassette. A reticle storage unit is installed near the reticle cassette storage unit and includes a second storage module(250) to store a reticle. A cassette transfer device(150) transfers the reticle cassette between the reticle cassette storage unit and the reticle storage unit and is installed in the reticle cassette storage unit.