DEVICE FOR MEASURING QUANTITY OF SUBSTRATE

摘要

PURPOSE: A device for measuring the number of substrates is provided to reduce manufacturing costs and to enhance product reliability and productivity by measuring the number of substrates rapidly, accurately, and conveniently. CONSTITUTION: A device(100) for measuring the number of substrates comprises a scan unit(110) and a detection unit(120). The scan unit laser-scans a substrate laminating body(10) in which a plurality of substrates is laminated in a side of the substrate laminating body along a direction of laminating the substrates. The scan unit generates beams for signals to measure the number of the laminated substrates. The detection unit receives the beams, thereby detecting the number of the substrates. Resin layers of each substrate are exposed to a lateral surface. The beams for the signal are fluorescence beams.