STAGE APPARATUS AND COOLING UNIT

摘要

PURPOSE: A stage device and a cooling unit are provided to minimize heat transfer from a movable element to a moving element by interposing a cooling member having a bracket function between the movable element and the moving element. CONSTITUTION: A stage device(1A) has an X-axial moving element(6) driven by an X-axial shaft motor(5), a Y-axial moving element(4) driven by a Y-axial shaft motor comprising a Y-axial fixed element(31) and a Y-axial movable element(32), an X-axial fixed element(51), and an X-axial movable element(52). Cooling jackets(8A,9A) and a tube are selectively attached to or detached from one or more areas of the peripheries of the X- and Y-axial movable elements. The area to install the cooling jackets is properly selected according to the calorific values of the X- and Y-axial shaft motors.