| 摘要 |
PURPOSE: A vacuum-based thermal treating apparatus is provided to implement maintenance for the apparatus by replacing a first filter and/or a second filter. CONSTITUTION: A vacuum-based thermal treating apparatus includes a chamber(10), a reacting container(30), a heating member(40), an exhaust pipe(50), and a filter. The reacting container is positioned in the chamber. The heating member is positioned between the chamber and the reacting container. The heating member heats the reacting container. The exhaust pipe exhausts the inner part of the reacting container. The filter is positioned in the exhaust pipe. The filter includes a first filter(61) at the internal part of the chamber. The filter includes a second filter(62) at the external part of the chamber.
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