| 摘要 |
PURPOSE: A raw material supply apparatus is provided to prevent a raw material from leaking from a container and contaminating a deposition apparatus by reciprocating a heater and a cooling unit along the length of a container without lifting the raw material. CONSTITUTION: A raw material supply apparatus(100) comprises a raw material container(110) which accommodates a solid or liquid raw material(1), a first heater(120) which is installed in the raw material container and supplies heat to the raw material container to evaporate the raw material, a second heater(140) which is installed above the first heater in the raw material container and supplies heat to the raw material container in order to prevent the phase change of the evaporated raw material into the liquid or solid state, a cooling unit(130) which is connected to the first heater and installed in the raw material container to cool the raw material in the raw material container, and a transfer unit(150) which reciprocates the first heater and the cooling unit along the length of the raw material container.
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