| 摘要 |
<p>PURPOSE: A pellicle frame and a pellicle including the same are provided to simultaneously grip pellicles based on a plurality of handling jigs if a pellicle frame is used. CONSTITUTION: A pellicle frame(1) is rectangular. Eight or more pellicle handling jig holes are penetrated at the outer peripheral wall of the pellicle frame. Two or more of the jig holes are formed at two pairs of facing sides of the pellicle frame. Four or more of the jig holes are formed at one pair of facing sides of the pellicle frame. The cross sections of the jig holes are circular. The inner sides of the jig holes are tapered.</p> |
