发明名称 |
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, PROGRAM, AND COMPUTER RECORDING MEDIUM |
摘要 |
<p>The present invention includes: an upper container and a lower container relatively movable and uniting together into one body to form a processing space; a substrate holding part provided inside the lower container and mounting and holding the substrate thereon; and a delivery arm including a support member extending vertically downward from a lower surface of the upper container, and a delivery member supported by the support member and holding an outer peripheral portion of the substrate and delivering the substrate to/from the substrate holding part, wherein the delivery arm is movable together with the upper container in the vertical direction relative to the lower container, and a cutout groove capable of housing the delivery member is formed at a position corresponding to the delivery member at the outer peripheral portion of the substrate holding part.</p> |
申请公布号 |
KR20120091323(A) |
申请公布日期 |
2012.08.17 |
申请号 |
KR20127014724 |
申请日期 |
2011.03.02 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HIRAKAWA OSAMU |
分类号 |
H01L21/02;H01L21/677;H01L21/683 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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