发明名称 |
METHOD FOR PRODUCING SILICA-BASED GLASS SUBSTRATE FOR IMPRINT MOLD, AND METHOD FOR PRODUCING IMPRINT MOLD |
摘要 |
The present invention relates to a method for producing a silica glass substrate for an imprint mold, containing: obtaining a glass body from a glass-forming raw material containing an SiO2 precursor; machining the glass body into a glass substrate having a predetermined shape; and removing an affected layer on a surface of the glass substrate, to produce a silica glass substrate for an imprint mold having a fictive temperature distribution in a region from the surface to a depth of 10μm on the side to be subjected to a transfer pattern formation of the glass substrate being within ±30° C.
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申请公布号 |
US2012205343(A1) |
申请公布日期 |
2012.08.16 |
申请号 |
US201213445345 |
申请日期 |
2012.04.12 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
KOIKE AKIO;MIYASAKA JUNKO |
分类号 |
C03C15/00 |
主分类号 |
C03C15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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