CLEANER FOR WAFER CONTAINER

摘要

PURPOSE: An apparatus for cleaning a wafer container is provided to enable a user to easily manage the wafer container by checking object information of the wafer container in a cleaning process. CONSTITUTION: A rotor(10) is pivotally installed around a vertical axis. A plurality of container holders(12) supports a container body(22) and a container cover(24) of a wafer container(20). A cleaning solution spray nozzle(30) sprays cleaning solutions in the wafer container. An electronic tag reader(40) wirelessly recognizes an electronic tag(26) attached to the wafer container and transmits the electronic tag to a host computer. An installing member(50) installs each electronic tag reader to correspond to the container holder.