| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately detect the vibration of an optical member when the optical member is vibrated by a piezoelectric device, without affected by the reflection of the vibration on the end face of the optical member. <P>SOLUTION: A foreign object removal unit includes: a rectangular shaped optical member disposed on an optical path and having an optical effective region through which a light flux passes; a piezoelectric member; and the piezoelectric device including a drive electrode and a sensor electrode formed on the surface of the piezoelectric member. The piezoelectric device is adhered to the surface of the optical member along one side of the optical member outside the optical effective region. The sensor electrode is formed on the surface of the piezoelectric member in such a manner as to be positioned within the range of the optical effective region in the direction of the side of the optical member to which the piezoelectric device is adhered. <P>COPYRIGHT: (C)2012,JPO&INPIT |
