METHOD FOR PRODUCING SOLID ELECTROLYTE THIN FILM, AND METHOD FOR MANUFACTURING THIN FILM SOLID LITHIUM-ION SECONDARY BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a solid electrolyte thin film using a magnetron sputtering device, producible of a thin film electrolyte free from damage to the surface by energy in a plasma, and a method for manufacturing a thin film solid lithium-ion secondary battery.

SOLUTION: In the method for producing a solid electrolyte thin film using a parallel flat plate type magnetron sputtering device, a solid electrolyte thin film that is a nitrogen-substituted lithium phosphate thin film is produced under pressure of 0.1-2.0 Pa by a sputtering method using a target composed of a lithium phosphate sintered body by supplying a rare gas and nitrogen gas. The thin film solid lithium-ion secondary battery having the resulting solid electrolyte thin film is manufactured.

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