| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a center deviation measuring device and a method therefor capable of reducing time needed for measuring center deviation of the inner periphery and the outer periphery of a disk-shaped substrate having a circular hole in the central part. <P>SOLUTION: A center deviation measuring device for measuring center deviation of the inner periphery and the outer periphery of a disk-shaped substrate W having a circular hole in the central part is provided with: a measuring part which measures the radial width B of the main plane S between the inner peripheral end surface C1 and the outer peripheral end surface C2 in a measuring region DA formed in between a light projection part and a light receiving part, over the whole periphery of the disk-shaped substrate in a non-contact state; and a calculation part for calculating the center deviation by calculating the difference A between the maximum value Bmax and the minimum value Bmin of the radial width B measured by the measuring part and using the difference A. <P>COPYRIGHT: (C)2012,JPO&INPIT |
