<p>A three-axis load sensor utilizing four piezoresistive devices on a flexible silicon membrane is provided. The load sensor further includes a mesa disposed on the membrane substantially equidistant from the piezoresistive devices. A six-axis load cell is provided by placing a plurality of load sensors disposed on a substrate, the substrate configured to attach to an object wherein forces applied to the object can be measured and/or determined. The load sensors can be manufactured using bulk microfabrication techniques on a single crystal silicon wafer, and can detect normal and shear loading applied to the membrane.</p>
申请公布号
WO2012106799(A1)
申请公布日期
2012.08.16
申请号
WO2012CA00096
申请日期
2012.02.07
申请人
THE GOVERNORS OF THE UNIVERSITY OF ALBERTA;BENFIELD, DAVID;MOUSSA, WALIED AHMED MOHAMED