| 摘要 |
<P>PROBLEM TO BE SOLVED: To utilize a share image of a surface to be tested outputted from an imaging device of an interferometer, and to directly recognize the actual surface shape regardless of the shape of the surface to be tested. <P>SOLUTION: On the basis of the fact that each of wave front distribution surface side normals k<SB POS="POST">1</SB>-k<SB POS="POST">C1</SB>of each of respective minute cells W<SB POS="POST">1</SB>-W<SB POS="POST">C1</SB>obtained by sectioning a wave front distribution surface W matches with an optical path of any reflected light of illumination light (incident light) made incident on a surface 13a to be tested tracing an optical path to be converged at a spherical center O of a subject 13 during measurement by an interferometer 1, for each of the wave front distribution surface side normals k<SB POS="POST">1</SB>-k<SB POS="POST">C1</SB>in the minute cells W<SB POS="POST">1</SB>-W<SB POS="POST">C1</SB>of the wave front distribution surface W, that is, each of the wave front distribution surface side normals k<SB POS="POST">1</SB>-k<SB POS="POST">C1</SB>equivalent to the reflected light from the surface 13a to be tested, illumination light wave front side normals l<SB POS="POST">1</SB>-l<SB POS="POST">C1</SB>corresponding to them, that is, the optical path of the incident light, is found, and intersection positions R(1)-R(C1) of the two optical paths, that is, the wave front distribution surface side normals k<SB POS="POST">1</SB>-k<SB POS="POST">C1</SB>and the illumination light wave front side normals l<SB POS="POST">1</SB>-l<SB POS="POST">C1</SB>, are obtained and defined as the data of the actual surface shape of the surface 13a to be tested. <P>COPYRIGHT: (C)2012,JPO&INPIT |
