| 摘要 |
<P>PROBLEM TO BE SOLVED: To convey and process the substrate of a solar cell while sucking and fixing to a holding plate and compensating for the strength of the substrate, and to convey and process even a thin substrate having a thickness of about 50 μm stably while reducing the cost of the solar cell. <P>SOLUTION: The holding method of a solar cell substrate includes a step for holding a solar cell substrate on a holding plate having a concave structure in at least a part of a surface abutting against the substrate in an atmosphere of pressure P1 which is lower than the atmospheric pressure, and a step for forming a joint body where the substrate is fixed to the holding plate by exposing the substrate, in the state held on the holding plate, to atmospheric pressure P2 which is higher than P1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
