| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical module capable of preventing variations of a gap between reflecting films of an interference filter and of measuring accurate spectral characteristics, and further to provide an optical analysis device. <P>SOLUTION: A colorimetric sensor 4 comprises: a first substrate 51; a second substrate 52 opposing to the first substrate 51; a fixed mirror disposed on a surface of the first substrate 51 opposite to the second substrate 52; an etalon 5 having a movable mirror that is disposed on the second substrate 52 so as to oppose to the fixed mirror through a predetermined gap therebetween; a light receiving element 42 for receiving light to be inspected that has been transmitted through the etalon 5; and a holding member 43 for holding the etalon 5. As viewed in a plan view in a substrate thickness direction, the etalon 5 comprises an optical interference region Ar1, through which the first substrate 51 and the second substrate 52 oppose to each other, and a projection region Ar2 projecting from the optical interference region Ar1. The holding member 43 holds the etalon 5 at one end side in the projection region Ar2 opposite to the optical interference region Ar1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
