发明名称 GRINDING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To perform accurate grinding so that a prescribed member embedded into the other member may be applied with cueing. <P>SOLUTION: The grinding device comprises a holding means in which a holding face for holding a workpiece is formed, a processing means which grinds the workpiece held by the holding means, and a control means which controls the movement of the processing means. The workpiece is constituted of a first member whose reflectance is first reflectance, and a second member which covers the first member and whose reflectance is second reflectance, the control means has a detection part which irradiates detection light to a face to be ground of the workpiece, and receives reflection light from the face to be ground, and when it is decided that the first member covered by the second member is exposed on the basis of a light receiving amount detected by the detection part, the grinding of the workpiece is stopped. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012152858(A) 申请公布日期 2012.08.16
申请号 JP20110014588 申请日期 2011.01.26
申请人 DISCO CORP 发明人 YOSHIDA SHINJI
分类号 B24B49/04;B24B49/12;H01L21/304 主分类号 B24B49/04
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