| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress variation of the ratio of a flow rate Q 1 of an aerosol flow and a flow rate Q 2 of a sheath gas, and maintain the flow rate Q 1 of the aerosol flow constant even when a temperature or a pressure of a sample gas varies. <P>SOLUTION: The flow rate Q 1 of the aerosol flow is set by a capillary with fixed fluid resistance. A flow rate adjustment part 11 for adjusting a flow rate Q 2 of a sheath gas flow channel 8 is constituted of a capillary (11a) disposed in series to the flow channel and having fixed fluid resistance, and a flow rate variable orifice (11b) with fluid resistance smaller than that of the capillary (11a). <P>COPYRIGHT: (C)2012,JPO&INPIT |
