| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection method using PCR, for ensuring contact with the PCR to be used together and further contact with a measuring node part and solving the problems of high costs and contamination that an inspection jig using the PCR has, though in a simple configuration. <P>SOLUTION: A movable pin planted substrate 17 which includes a plurality of conductive movable pins 18 passing through a substrate 15 in the thickness direction and projecting from the surface of the substrate 15 at both ends, the movable pins 18 being capable of finely moving in the length direction, is used. A PCR 10 conducting in the thickness direction of an electric insulation sheet by embedding a conductive part inside the electric insulation sheet is piled up on one surface of the movable pin planted substrate 17, and a measurement node 5 of an inspection object 4 and an inspection device are electrically connected through the movable pin planted substrate 17 and the PCR 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
