| 摘要 |
Provided is a piezoelectric vibration type force sensor including a vibration body including a disk-shaped piezoelectric material and a pair of drive electrodes, for vibrating in a radial direction of the piezoelectric material when an AC voltage is applied to the pair of drive electrodes, a substrate to be brought into contact with a surface on one side of the vibration body, an elastic member that is disposed to be brought into contact with a surface on another side of the vibration body, and a holding member including a contact portion and a loose-fit portion that loosely fits in the hollow through hole. The holding member fixes the contact portion and the loose-fit portion to the substrate so that movements of the vibration body in a vibration direction and in a direction orthogonal to the vibration direction are restricted for positioning. |
