发明名称 METHOD FOR FORMING GAPLESS SEMICONDUCTOR THIN FILM
摘要 Provided is a method for forming a gapless semiconductor thin film. The method includes the steps of providing a lead palladium oxide target, arranging the lead palladium oxide target in a vacuum container and providing a substrate, and forming a lead palladium oxide thin film on the substrate using the lead palladium oxide target.
申请公布号 US2012205237(A1) 申请公布日期 2012.08.16
申请号 US201213346309 申请日期 2012.01.09
申请人 JUNG MYUNG-HWA;LEE SUNG-IK;SUNYOUNG LEE 发明人 JUNG MYUNG-HWA;LEE SUNG-IK;SUNYOUNG LEE
分类号 C23C14/34;C23C14/08 主分类号 C23C14/34
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