| 摘要 |
The present invention provides a device for detecting foreign matter and a method for detecting foreign matter on the surface of an object or included within the object, the object being a film of an electrode mixture or the like, and thereby improving the reliability of the object under inspection. The object is irradiated with terahertz illuminating light (100) (4 µm-10 mm wavelength), whereupon scattered light (660) from the object, for example, an electrode (10), is detected in the form of a signal by an optical scatter detector (200), to thereby detect foreign matter, for example, metal foreign matter (720), on the surface of the electrode (10) or included within the electrode (10). The electrode (10) is formed by coating both faces of a collector (710) with an electrode mixture layer (700) containing an active material (701), a conductive auxiliary, and a binder as constituent elements. The scattered light (660) is generated by reflection of a portion of transmitted light (656) by the metal foreign matter (720). |
