发明名称 |
MEMS DEVICES EXHIBITING LINEAR CHARACTERISTICS |
摘要 |
A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate. |
申请公布号 |
WO2012109645(A2) |
申请公布日期 |
2012.08.16 |
申请号 |
WO2012US24840 |
申请日期 |
2012.02.13 |
申请人 |
PERDUE RESEARCH FOUNDATION;CLARK, JASON, VAUGHN |
发明人 |
CLARK, JASON, VAUGHN |
分类号 |
G01P15/125;H01G5/16 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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