发明名称 METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD
摘要 A method for manufacturing a liquid discharge head provided with a substrate which has a layer made of silicon nitride and with a discharge port forming member which is disposed above the layer made of silicon nitride and has a discharge port for discharging liquid. The method includes providing a photosensitive layer that is to be the discharge port forming member above the layer made of silicon nitride, and forming the discharge port by exposing the photosensitive layer to i-line. The layer made of silicon nitride has a refractive index of 2.05 or more to light of a wavelength of 633 nm and irradiation with the i-line is performed in the exposure.
申请公布号 US2012206535(A1) 申请公布日期 2012.08.16
申请号 US201213456977 申请日期 2012.04.26
申请人 YAMAMURO JUN;OHSUMI MASAKI;WATANABE MASAHISA;EDAMATSU KEIJI;CANON KABUSHIKI KAISHA 发明人 YAMAMURO JUN;OHSUMI MASAKI;WATANABE MASAHISA;EDAMATSU KEIJI
分类号 B41J2/015 主分类号 B41J2/015
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