PATTERN OBSERVATION APPARATUS, RECIPE PREPARATION APPARATUS, AND RECIPE PREPARATION METHOD

摘要

PROBLEM TO BE SOLVED: To prepare a recipe required for imaging of an image of a review apparatus with high efficiency in order to identify any of possible causes of failure positions, based on the result of a failure analysis system.

SOLUTION: A pattern observation apparatus or a recipe preparation apparatus connected to the pattern observation apparatus has a recipe preparation section for setting imaging conditions of an image so as to pick up the image, based on wiring information including a failure position input from a failure analysis system connected with the pattern observation apparatus through a network, along wiring including the failure position.

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