| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode structure of a substrate inspection jig capable of miniaturizing and simplifying a structure of an electrode portion, and having contact safety. <P>SOLUTION: A substrate inspection jig has a holding body for holding a probe, and an electrode body equipped with a plurality of electrode portions. The probe is equipped with a first contact piece formed in a cylindrical shape by conductive material, and a second contact piece formed in a rod shape by conductive material and stored in the first contact piece while being insulated from the first contact piece. The electrode portion is formed in a ring-shape in a plane view; and equipped with a first electrode portion conductively contacting with the first contact piece, and a circular second electrode portion disposed concentrically with the first electrode portion without electrically contacting with the first electrode portion in a plane view, and conductively contacting with the second contact piece. The first electrode portion is relatively projected out than the second electrode portion. <P>COPYRIGHT: (C)2012,JPO&INPIT |
