| 摘要 |
The invention relates to an autofocusing method for use in the microscopic examination of an object (3) lying in the focus of a microscope objective (2) of a microscope (1), using an autofocus beam path (4), wherein the autofocus beam path (4) is directed toward the microscope objective (2) by means of a deflecting device (5) arranged on the side of the microscope objective facing away from the object and from there to a reflective autofocus interface (7) in the object region, and the autofocus beam path (4) reflected on the autofocus interface (7) is directed toward an autofocus detector (9) by means of the microscope objective (2) and the deflecting device (5), wherein the deflecting device (5) has two regions (51, 52; 53, 54), which are arranged at a distance from each other in the propagation direction of the autofocus beam path (4) and which each reflect the autofocus beam path (4), for producing interfering sub-beams (41, 42, 43, 44) of the autofocus beam path (4), and wherein the autofocus detector (9) is arranged in a plane conjugate to that of the microscope objective aperture in order to detect an interference pattern produced there, wherein the focus of the microscope (1) is adjusted according to the detected interference pattern (10). |
