发明名称 METHOD OF FABRICATING CONTIGUOUS MICROLENS ARRAY
摘要 A method of fabricating a contiguous microlens array is disclosed. First, an array of photoresist patterns is formed, wherein each photoresist pattern has a substantially circular or polygonal shape in a top view and neighboring photoresist patterns are connected with each other or close to each other. Then a reflow step is performed to heat the photoresist patterns thereby rounding a surface of each photoresist pattern and connecting the neighboring photoresist patterns that are close to each other. Finally, a fixing step is performed to fix a shape of each photoresist pattern. The shape of the curved surface of a microlens in the microlens array is selectively adjusted according to its position in the array and the incident angle of light incident thereto.
申请公布号 US2012205827(A1) 申请公布日期 2012.08.16
申请号 US201213457776 申请日期 2012.04.27
申请人 LIN YU-TSUNG;WU HSIN-PING;KAO HUNG-CHAO;WANG MING-I;UNITED MICROELECTRONICS CORP. 发明人 LIN YU-TSUNG;WU HSIN-PING;KAO HUNG-CHAO;WANG MING-I
分类号 G02B1/12;B29D11/00 主分类号 G02B1/12
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