METHOD FOR MANUFACTURING NITRIDE CRYSTAL, REACTION VESSEL, AND CRYSTAL MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a high-quality nitride crystal without damaging while effectively preventing the great breakage of a reaction vessel.

SOLUTION: After sealing the reaction vessel filled with at least a raw material and an ammonia solvent, the reaction vessel is loaded in a pressure-resistant vessel, the inside of the reaction vessel is made to a supercritical state and/or a subcritical ammonia atmosphere, and the nitride crystal is developed in the reaction vessel using one provided with a pressure regulation region (23) in a part.

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