| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a brittle material fine particle, which can form a brittle material fine particle film having high density, high compactness and high adhesiveness at room temperature without needing high-temperature substrate heating and thermal treatment steps. <P>SOLUTION: The brittle material fine particle has an average particle size of 50 nm or more and 1 μm or less and a non-spherical amorphous shape, includes at least 30% by volume of fine particle having an angular shape determined as a two-dimensional image by electron microscopic observation in at least one portion or more, the point angle (θ) of the angle being 140° or less. Film formation is performed using the fine particle by means of aerosol 7 type gas deposition by use of a fine deposition system 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
