| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such problems that, in an optical inspection device, since deviation and the like of an optical system exerts an influence on an inspection result, an adjustment is required; since deviation in position coordinates of a defect influences on a review, a correction of the position coordinates is required; the adjustment of the optical system and the calculation of a correction value has been conventionally performed by operators, and it has taken a long therefor; and, when the accuracy of the coordinates in a review device is taken account, a further long time is required for the adjustment and the calculation of the correction value. <P>SOLUTION: The detected position of the defect is changed using a review result of a reference sample by a review device and the inspection result of the reference sample. <P>COPYRIGHT: (C)2012,JPO&INPIT |
