发明名称 |
TEMPERATURE MEASUREMENT APPARATUS AND METHOD |
摘要 |
A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.
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申请公布号 |
US2012207189(A1) |
申请公布日期 |
2012.08.16 |
申请号 |
US201213428870 |
申请日期 |
2012.03.23 |
申请人 |
ABE JUN;MATSUDO TATSUO;KOSHIMIZU CHISHIO;TOKYO ELECTRON LIMITED |
发明人 |
ABE JUN;MATSUDO TATSUO;KOSHIMIZU CHISHIO |
分类号 |
G01K11/00 |
主分类号 |
G01K11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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