| 摘要 |
A contact type prove achieves a high-precision measurement of a shape of even a steeply-inclined surface in the vicinity of vertical by controlling a contact force stably. In a shape measuring method for measuring the shape of the surface of a measured object by moving a contact type probe along the surface of the measured object, a slope of the measured object surface is estimated depending on the magnitude of a component force of the contact force applied to the probe and when it is determined that the slope is in the vicinity of vertical, a probe supporting unit is moved in a direction perpendicular to the moving direction of the probe supporting unit.
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