发明名称 INTERFEROMETER
摘要 The light from the light source of the wideband light is reflected by VIPA so that reflection distance varies step by step. In VIPA, the light that phase changed is generated depending on the depth of the step. A interference profile is measured by this reflected light and optical path length modulator by synthetic light with the generated optical frequency comb. The interferometer does not have a movable scanning mechanism, and the operation of the Fourier transform is unnecessary. Thus, it has the measurement of the short time. The measurement of the coaxial tomography and the one-dimensional coaxial tomography of the depth direction is possible. The measurement of the two-dimensional coaxial tomography of the depth direction is possible.
申请公布号 US2012206730(A1) 申请公布日期 2012.08.16
申请号 US201013262389 申请日期 2010.03.30
申请人 发明人 SHIODA TATSUTOSHI
分类号 G01B9/02 主分类号 G01B9/02
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