| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric vibration piece in which developer is sufficiently immersed into a fork portion to form a mask pattern with good accuracy and formation failure of an electrode can be prevented, a piezoelectric vibration piece manufactured by the manufacturing method, a piezoelectric vibrator, an oscillator, an electronic apparatus and an electric wave clock using the piezoelectric vibration piece. <P>SOLUTION: In a manufacturing method of a piezoelectric vibration piece 4 for forming electrodes on the surface of a piezoelectric plate by using photolithography technique, an electrode forming process of forming excitation electrodes 13 and 14 includes: an exposure process S125 of exposing a photoresist (mask material); a development process S127 of immersing the photoresist in developer to selectively remove the photoresist and forming a mask pattern; and an etching process S129 of forming excitation electrodes 13 and 14, and between the exposure process S125 and the development process S127, the method includes an immersion process S126 of immersing a piezoelectric plate coated with photoresist in first liquid which is soluble to the developer and has lower viscosity than the developer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
