发明名称 TARGET POSITION DETECTION APPARATUS FOR ROBOT, SEMICONDUCTOR DEVICE AND TARGET POSITION DETECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a target position detection apparatus for a robot that can highly accurately detect the position of a target. <P>SOLUTION: In a robot 22, a wrist free to move in a horizontal direction is provided at a tip end of an arm 32 free to move in three axial directions, X-axis, Y-axis and Z-axis, and the wrist includes a hand 33 as an end effector. A control means 23 stores a teaching point in a storage part 26, and controls operation of the robot 22 to move the hand 33 toward the teaching point stored in the storage part 26. This control means 23 can change a control loop gain to change a pressing force of the hand 33 to a target 46, decreases the control loop gain of a wrist axis to a value lower than a predetermined value from the neighborhood of the teaching point where at least the target 46 is present, to bring the hand 33 into contact with the target 46, captures a position of the hand 33 in contact with the target 46, and detects the position of the target 46. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012152898(A) 申请公布日期 2012.08.16
申请号 JP20120110056 申请日期 2012.05.11
申请人 KAWASAKI HEAVY IND LTD 发明人 HASHIMOTO YASUHIKO;SHIMOMURA NOBUTAKA;YAMAGUCHI TAKAO;YOSHIDA TETSUYA
分类号 B25J13/00;B25J13/08;H01L21/677 主分类号 B25J13/00
代理机构 代理人
主权项
地址