| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the following problem:in order to provide a compact coating apparatus, the capacity of a processing liquid holding section for holding the processing liquid to be supplied to a coating roller must be reduced, resulting in difficulty in maintaining a constant amount of liquid. <P>SOLUTION: A liquid chamber 234 includes: a first liquid level sensor 261 detecting that the liquid level of a processing liquid 201 is a first level, and a second liquid level sensor 262 detecting that the liquid level of a processing liquid 201 is a second level higher than the first level. The processing liquid 201 to be supplied to the liquid chamber 234 is controlled by controlling drive of a pump 203 based on the detection results of the first and second liquid level sensors 261, 262, to control the liquid level of the processing liquid 201 in the liquid chamber 234 before driving a coating roller 232 at the second level, and control the liquid level of the processing liquid 201 in the liquid chamber 234 during driving the coating roller 232 at the first level. <P>COPYRIGHT: (C)2012,JPO&INPIT |
