发明名称 |
Systems and Methods Eliminating False Defect Detections |
摘要 |
A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not indentified in the second set of defect candidates.
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申请公布号 |
US2012207381(A1) |
申请公布日期 |
2012.08.16 |
申请号 |
US201113025709 |
申请日期 |
2011.02.11 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
ONG BIOW-HIEM;LAI CHIEN-HUNG;TU CHIH-CHIANG;CHANG JONG-YUH;LIU KUANG-YU |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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