发明名称 Systems and Methods Eliminating False Defect Detections
摘要 A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not indentified in the second set of defect candidates.
申请公布号 US2012207381(A1) 申请公布日期 2012.08.16
申请号 US201113025709 申请日期 2011.02.11
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 ONG BIOW-HIEM;LAI CHIEN-HUNG;TU CHIH-CHIANG;CHANG JONG-YUH;LIU KUANG-YU
分类号 G06K9/00 主分类号 G06K9/00
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