发明名称 |
UNDERLAYER COATING COMPOSITION AND PROCESS FOR MANUFACTURING A MICROELECTRONIC DEVICE |
摘要 |
The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV. |
申请公布号 |
WO2012107823(A1) |
申请公布日期 |
2012.08.16 |
申请号 |
WO2012IB00213 |
申请日期 |
2012.02.07 |
申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
YAO, HUIRONG;BOGUSZ, ZACHARY;LIN, GUANYANG;NEISSER, MARK, O. |
分类号 |
G03F7/09 |
主分类号 |
G03F7/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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