| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray foreign matter detector capable of preventing interference of X-rays with different radiation qualities from occurring in a detection step. <P>SOLUTION: An X-ray foreign matter detector comprises: a conveying part 2 for conveying an inspection object W through a conveyance path; an X-ray generator 9 for irradiating the inspection object conveyed through the conveyance path with a plurality of X-rays; an X-ray detector 10 for outputting detection data in accordance with the X-rays emitted by the X-ray generator 9 and transmitting the inspection object W; a rotary plate 70 that is disposed between the X-ray generator 9 and the X-ray detector 10 to be rapidly rotated around a rotational axis, includes a shielding portion 71 for shielding X-rays and a transmitting portion 72 for transmitting X-rays alternately provided in a rotation direction, so as to separate the plurality of X-rays from the X-ray generator 9 over time by rapidly rotating around the rotational axis for successively transmitting any one of the plurality of X-rays; and a determining part 48 for determining whether or not there is foreign matter included in the inspection object W on the basis of the detection data output by the X-ray detector 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
