| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which the potential gradient, which is brought about by preliminary charging, is suppressed without changing the lens conditions of the electron microscope. <P>SOLUTION: A scanning deflector is controlled so that a specimen is scanned with a second beam for detecting electrons emitted from the specimen after scanning the specimen with a first beam for charging the surface of the specimen. Scanning with the first beam is carried out so that the charge density on the periphery of the scanning region of the first beam is increased relatively to the charge density in the center part of the scanning region of the first beam. <P>COPYRIGHT: (C)2012,JPO&INPIT |
