| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device which can suppress degradation in performance due to contamination. <P>SOLUTION: The exposure device comprises a first member which can form a first immersion space by a liquid for exposure so as to fill the optical path of exposure light with the liquid for exposure, a second member which can form a second immersion space by a liquid for cleaning at a position separated from the first member, and a vibration generator which imparts a vibration to the liquid in the second immersion space. The second immersion space is formed between the second member and a predetermined member facing the second member, and the predetermined member is cleaned by the liquid for cleaning. <P>COPYRIGHT: (C)2012,JPO&INPIT |
