| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum deposition apparatus in which a sublimable material set in a crucible used for vacuum vapor deposition is hard to bump. <P>SOLUTION: The vacuum deposition apparatus includes: a vacuum chamber (10); a crucible (11) which is provided in the vacuum chamber (10) and stores a vapor deposition material; and a uniform heating mechanism (20) for heating the vapor deposition material provided in the crucible (11). The uniform heating mechanism (20) has a heater (21) provided around the crucible (11) and a carbon rod (23) provided in the crucible (11). The vapor deposition material (2) is arranged between the crucible (11) and the carbon rod (23), and is nearly uniformly heated by both of the crucible (11) heated by the heater (21) and the carbon rod (23) and is evaporated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
