| 摘要 |
A flow controller includes a flow detection unit that includes a detection unit for detecting the flow rate of a fluid; and a flow control unit that is coupled to the flow detection unit and that is capable of adjusting the flow rate of the fluid. The detection sensor constituting the detection unit includes a thermal flow sensor using MEMS technology, and the flow rate of the fluid that has been detected by the detection sensor is output to a control unit. In addition, in the flow control unit, the supply state of air to a supply room is switched by each of a supply-use solenoid valve and an exhaust-use solenoid valve, and on the basis of the supply state of the air, a control valve opens and closes.
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