FLUID CONTROL DEVICE AND PRESSURE CONTROL DEVICE

摘要

A fluid control device that can, with a digitally controlled valve controller, achieve responsiveness close to conventional analog control is provided with: a fluid control valve in a flow path through which fluid flows; fluid measurement parts that measure a physical quantity related to the fluid; and a valve controller configured to control, on the basis of a deviation between a physical quantity value measured in the fluid measurement part and a preliminarily set setting value, a fluid control valve's opening level by digital control. The valve controller 4 is provided with: an operation amount calculation part configured to perform calculation on an inputted value to output a value related to an operation amount for the opening level of the fluid control valve; and a phase compensation part configured to output a value obtained by compensating an inputted value for a phase shift by velocity type digital calculation.