| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal processing furnace that overcomes or mitigates a problem of backflow of material deposited near the downstream end of a gas exhaust path, and also provide a liner that may be installed in a conventional thermal processing furnace (possibly as a replacement for the originally installed liner) so as to overcome or mitigate the problem of backflow. <P>SOLUTION: A thermal processing furnace comprises: a generally bell jar-shaped outer reaction tube having a central axis; and an open-ended inner reaction tube for accommodating a wafer boat holding a plurality of substrates. The inner reaction tube is substantially coaxially disposed within the outer reaction tube, thereby defining a gas passage between an outer wall of the inner reaction tube and an inner wall of the outer reaction tube. At least one of the outer wall of the inner reaction tube and the inner wall of the outer reaction tube is provided with a flow deflector that protrudes radially from the respective wall into the gas passage. <P>COPYRIGHT: (C)2012,JPO&INPIT |
