THIN FILM THERMISTOR SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a thin film thermistor sensor capable of obtaining a good adhesion of an electrode part, and having stable electric characteristics corresponding to design values, and a method for manufacturing the same.

SOLUTION: A thin film thermistor sensor comprises an insulating substrate 2 in which an insulating layer 2a is formed thereon; a thermistor thin film 3 pattern formed on the insulating layer 2a; a pair of electrodes 4 pattern formed from a top surface of the insulating substrate 2 to a bottom surface of the thermistor thin film 3; and a pair of lead frames 5 connected to a pair of the electrodes. A pair of the electrodes comprise a pair of electrode pad parts 4a connected to the lead frames; and a pair of thermistor electrode parts 4b laminated on the bottom surface of the thermistor thin film. An electrode region 2a where a pair of the electrode pad parts of the insulating substrate is formed thereon has a surface roughness being rougher than that of a thermistor region 2B where the thermistor thin film is formed thereon.

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